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Dependence of the Non-prestonian behavior on characteristics of ceria slurry in STI-CMP6

제목
Dependence of the Non-prestonian behavior on characteristics of ceria slurry in STI-CMP6
저자
백운규
발행일
2004-10-22
학회명
가을 한국물리학회
개최지
제주대학교

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