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Multi-Density Structure of Al2O3 as a Moisture Permeation Barrier by Spatial Atomic Layer Deposition at Low Temperature

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제목
Multi-Density Structure of Al2O3 as a Moisture Permeation Barrier by Spatial Atomic Layer Deposition at Low Temperature
저자
전형탁
발행일
2017-11-16
학회명
2017학년도 한국재료학회 추계학술대회
개최지
경주 현대호텔

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