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Compositional and electrical modulation of niobium oxide thin films deposited by plasma-enhanced atomic layer deposition
- 제목
- Compositional and electrical modulation of niobium oxide thin films deposited by plasma-enhanced atomic layer deposition
- 저자
- 박진성
- 발행일
- 2019-05-16
- 학회명
- 춘계재료학회
- 개최지
- 평창, 한국