Enhancement of channel region in a FinFETs transistor with effective buried gate

  • 김태환
제목
Enhancement of channel region in a FinFETs transistor with effective buried gate
저자
김태환
발행일
2015-07-01
학회명
The 13th International Nanotech Symposium & Nano-Convergence Expo, NANO KOREA(2015)
개최지
Coex, Seoul, Korea