상세 보기
A study on the simulation and characterization of the barrier layers for EUV reflective multilayers for EUV lithography applications
- 제목
- A study on the simulation and characterization of the barrier layers for EUV reflective multilayers for EUV lithography applications
- 저자
- 안진호
- 발행일
- 2002-10-09
- 학회명
- The 3rd Japan-Korea Joint Workshop on Advanced Semiconductor Processes and Equipments
- 개최지
- Hakone