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ALD-Based Interlayer Engineering for Reliable Hybrid-Channel (Poly-Si/IGO) NAND Flash Devices

제목
ALD-Based Interlayer Engineering for Reliable Hybrid-Channel (Poly-Si/IGO) NAND Flash Devices
저자
박진성
발행일
2025-11-12
학회명
KSIM2025
개최지
부산 파라다이스 호텔

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