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Effect of Polystyrene-Sulfonate Surfactant on Reduction of Remaining Abrasives and Surface Roughness in Tungsten-Film Chemical-Mechanical-Polishing

  • 박재근
제목
Effect of Polystyrene-Sulfonate Surfactant on Reduction of Remaining Abrasives and Surface Roughness in Tungsten-Film Chemical-Mechanical-Polishing
저자
박재근
발행일
2018-10-01
학회명
2018 AiMES
개최지
Moon Palace Resort, Cancun

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