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Stabilization of Tetragonal Phase of Ti-doped ZrO2 Deposited by ALD

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Stabilization of Tetragonal Phase of Ti-doped ZrO2 Deposited by ALD
저자
전형탁
발행일
2023-07-26
학회명
23rd International Conference on Atomic Layer Deposition
개최지
Hyatt Regency Bellevue 900 Bellevue Way NE Bellevue, Washington(USA)

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