Charging Effect of Capacitive Resonant Sensor with Oxide-nitride Layer or Oxide Layer

제목
Charging Effect of Capacitive Resonant Sensor with Oxide-nitride Layer or Oxide Layer
저자
박관규
발행일
2018-07-06
학회명
International Symposium on Precision Engineering and Sustainable Manufacturing
개최지
Sapporo Convention Center, Sapporo, Japan