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Charging Effect of Capacitive Resonant Sensor with Oxide-nitride Layer or Oxide Layer
- 제목
- Charging Effect of Capacitive Resonant Sensor with Oxide-nitride Layer or Oxide Layer
- 저자
- 박관규
- 발행일
- 2018-07-06
- 학회명
- International Symposium on Precision Engineering and Sustainable Manufacturing
- 개최지
- Sapporo Convention Center, Sapporo, Japan