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The Effect of the Co-Solvent Addition on the Physicochemical Characteristics of Nano Colloidal Silica for Wafer Polishing Process

  • 박재근
제목
The Effect of the Co-Solvent Addition on the Physicochemical Characteristics of Nano Colloidal Silica for Wafer Polishing Process
저자
박재근
발행일
2004-10-15
학회명
2004 Fall meeting of Korean Ceramic Society
개최지
Gunsan University, Gunsan, Korea

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