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AMMONIA GAS EFFECT OF RAPID THERMAL ANNEALING ON OXYGEN PRECIPITATE FORMATION IN CZOCHRALSKI SILICON WAFER

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AMMONIA GAS EFFECT OF RAPID THERMAL ANNEALING ON OXYGEN PRECIPITATE FORMATION IN CZOCHRALSKI SILICON WAFER
저자
박재근
발행일
2003-04-26
학회명
춘계 한국물리학회
개최지
연세대학교

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