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A Comparative Study on Cation distribution effects in Heterogeneous channel IGZO TFTs via Atomic Layer Deposition Supercycle Design
- 제목
- A Comparative Study on Cation distribution effects in Heterogeneous channel IGZO TFTs via Atomic Layer Deposition Supercycle Design
- 저자
- 박진성
- 발행일
- 2024-08-07
- 학회명
- ALD/ALE 2024
- 개최지
- Messukeskus in Helsinki, Finland