A Comparative Study on Cation distribution effects in Heterogeneous channel IGZO TFTs via Atomic Layer Deposition Supercycle Design

제목
A Comparative Study on Cation distribution effects in Heterogeneous channel IGZO TFTs via Atomic Layer Deposition Supercycle Design
저자
박진성
발행일
2024-08-07
학회명
ALD/ALE 2024
개최지
Messukeskus in Helsinki, Finland