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Highly Dispersed Fe-Substituted Colloidal Silica Nanoparticles in Acidic pH region for Tungsten Chemical Mechanical Planarization (W CMP)
- 제목
- Highly Dispersed Fe-Substituted Colloidal Silica Nanoparticles in Acidic pH region for Tungsten Chemical Mechanical Planarization (W CMP)
- 저자
- 백운규
- 발행일
- 2023-03-08
- 학회명
- MATSUS 2023 & S-TECH 2023
- 개최지
- Palacio de Congresos of Valencia, Spain