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MCZ CRYSTAL GROWTH OF 300mm PURE SILICON CRYSTAL INGOT

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MCZ CRYSTAL GROWTH OF 300mm PURE SILICON CRYSTAL INGOT
저자
박재근
발행일
2003-11-14
학회명
ADVANCED CRYSTAL GROWTH CONFERENCE&2003 INTERNATINAL SYMPOSIUM ON SUBSTRATE ENGINEERING
개최지
한양대학교

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