상세 보기
- 제목
- Interfacial Chemical and Mechanical Reactions between Tungsten-Film and Nano-Scale Colloidal Zirconia Abrasives for Chemical-Mechanical-Planarization
- 저자
- 박재근
- 발행일
- 2021-06-04
- 학회명
- 12th International Symposium for Advanced Functional Materials & Devices
- 개최지
- On-line