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Synthesis of Superior-Performance InGaZnO Based on Ideal Reaction of Plasma Enhanced Atomic Layer Deposition
- 제목
- Synthesis of Superior-Performance InGaZnO Based on Ideal Reaction of Plasma Enhanced Atomic Layer Deposition
- 저자
- 박진성
- 발행일
- 2023-05-25
- 학회명
- Society for Information Display 2023
- 개최지
- Los angeles