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Modeling of a microwave plasma enhanced chemical vapor deposition system based on finite element method
- 제목
- Modeling of a microwave plasma enhanced chemical vapor deposition system based on finite element method
- 저자
- Ming-Chieh Lin
- 발행일
- 2019-10-22
- 학회명
- The 61st Annual Meeting of the APS Division of Plasma Physics (APS-DPP 2019)
- 개최지
- Fort Lauderdale, Florida