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The hole-patterned pellicle with a diameter of sub-220 nm as a solution to increase EUV transmittance
- 제목
- The hole-patterned pellicle with a diameter of sub-220 nm as a solution to increase EUV transmittance
- 저자
- 안진호
- 발행일
- 2023-11-17
- 학회명
- MNC 2023
- 개최지
- 삿포로 KEIO plaza 호텔