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Recent Progresses of Atomic Layer Deposited Oxide Semiconductors and Their Device Applications
- 제목
- Recent Progresses of Atomic Layer Deposited Oxide Semiconductors and Their Device Applications
- 저자
- 박진성
- 발행일
- 2018-10-15
- 학회명
- The 4th International Conference on ALD Applications & China ALD 2018 conference
- 개최지
- Shenzhen, China