ScholarWorks@한양대학교

상세 보기

On plasma parameters with changing chamber size

  • 김주호
제목
On plasma parameters with changing chamber size
저자
김주호
발행일
2022-10-04
학회명
75th Annual Gaseous Electronics Conference
개최지
Sendai International Center, Sendai, Japan

ScholarWorks@한양대학교

(04763) 서울특별시 성동구 왕십리로 222 Tel. +82-2-2220-1370 +82-2-2220-1366

COPYRIGHT © 한양대학교 All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.