Ultrathin and Highly Crystalline Indium Oxide Thin Films Using Novel Liquid In Precursor as a New Channel Material

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Ultrathin and Highly Crystalline Indium Oxide Thin Films Using Novel Liquid In Precursor as a New Channel Material
저자
박진성
발행일
2023-07-26
학회명
ALD 2023
개최지
Los angeles