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Ultrathin and Highly Crystalline Indium Oxide Thin Films Using Novel Liquid In Precursor as a New Channel Material
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- Ultrathin and Highly Crystalline Indium Oxide Thin Films Using Novel Liquid In Precursor as a New Channel Material
- 저자
- 박진성
- 발행일
- 2023-07-26
- 학회명
- ALD 2023
- 개최지
- Los angeles