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Effects of Al2O3 capping layer of La2O3 gate dielectrics grown by remote plasma atomic layer deposition

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Effects of Al2O3 capping layer of La2O3 gate dielectrics grown by remote plasma atomic layer deposition
저자
전형탁
발행일
2009-07-19
학회명
ALD 2009
개최지
Monterey, California, USA

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