상세 보기
- 제목
- THE EFFECT OF PHYSICOCHEMICAL CHARACTERISTICS OF CERIA PARTICLE ON NANOTOPOGRAPHY FOR CHEMICAL MECHANICAL PLANARIZATION
- 저자
- 박재근
- 발행일
- 2003-04-28
- 학회명
- 105th ANNUAL MEETING&EXPOSITION OF THE AMERICAN CERAMIC SOCIETY
- 개최지
- Garylord Opryland,nashville,Tennessee,USA