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Poly-Si Stop Chemical-mechanical-planarization Slurry using Core(Polystyrene)/shell(wet ceria) Abrasive Enhancing Polishing-rate and Scratch-less

  • 박재근
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Poly-Si Stop Chemical-mechanical-planarization Slurry using Core(Polystyrene)/shell(wet ceria) Abrasive Enhancing Polishing-rate and Scratch-less
저자
박재근
발행일
2017-11-08
학회명
IUMRS-ICA 2017
개최지
Taipei Nangang Exhibition Hall

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