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Response to “Comments on Seo et al., Materials & Design 117 (2017) 131–138, DOI: 10.1016/j.matdes.2016.12.066”
Erratum: Response to “Comments on Seo et al., Materials & Design 117 (2017) 131–138, DOI: 10.1016/j.matdes.2016.12.066” (Materials & Design (2024) 237, (S0264127523008882), (10.1016/j.matdes.2023.112473))
- Lee, Ganggyu;
- Lee, Kangchun;
- Moon, Jinok;
- Song, Taeseup;
- Lee, Dong-Hee;
- ... Paik, Ungyu
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We would like to respond to “Comments on Seo et al., Materials & Design 117 (2017) 131–138, https://doi.org/10.1016/j.matdes.2016.12.066″. Mangindaan et al. raised concerns about deriving the 2nd order equations for optimizing the W-pattern CMP slurry compositions. However, we clarify that there were no errors in deriving the 2nd order equations obtained by employing response surface methodology using a face-centered design model.
- 제목
- Response to “Comments on Seo et al., Materials & Design 117 (2017) 131–138, DOI: 10.1016/j.matdes.2016.12.066”
- 제목 (타언어)
- Erratum: Response to “Comments on Seo et al., Materials & Design 117 (2017) 131–138, DOI: 10.1016/j.matdes.2016.12.066” (Materials & Design (2024) 237, (S0264127523008882), (10.1016/j.matdes.2023.112473))
- 저자
- Lee, Ganggyu; Lee, Kangchun; Moon, Jinok; Song, Taeseup; Lee, Dong-Hee; Paik, Ungyu
- 발행일
- 2024-05
- 유형
- Editorial Material
- 권
- 241
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- 1 ~ 2