Characteristics of Tin Dioxide Thin Film by varying Ozone Injection Time in ALD for Transparent Conducting Oxide

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Characteristics of Tin Dioxide Thin Film by varying Ozone Injection Time in ALD for Transparent Conducting Oxide
저자
전형탁
발행일
2017-11-30
학회명
2017 MRS fall meeting
개최지
Hynes Convention Center