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Effect of Nano-Colloidal Abrasive size on Removal Rate and Selectivity of Cu/TaN Film in Cu CMP

  • 박재근
제목
Effect of Nano-Colloidal Abrasive size on Removal Rate and Selectivity of Cu/TaN Film in Cu CMP
저자
박재근
발행일
2005-05-27
학회명
한국재료학회 춘계학술발표대회
개최지
무주리조트 티롤호텔

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