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Effect of Slurry pH and H2O2 on Crystalline Ge2Sb2Te5 CMP Performance for PRAM Device

  • 박재근
제목
Effect of Slurry pH and H2O2 on Crystalline Ge2Sb2Te5 CMP Performance for PRAM Device
저자
박재근
발행일
2010-04-06
학회명
2010 MRS Spring Meeting
개최지
USA/San Francisco

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