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Angular Dependency of Off-axis Illumination on 100 nm-width Pattern Printability for Extreme Ultraviolet Lithography: Ru/Mo/Si Reflector System
- 제목
- Angular Dependency of Off-axis Illumination on 100 nm-width Pattern Printability for Extreme Ultraviolet Lithography: Ru/Mo/Si Reflector System
- 저자
- 정용재
- 발행일
- 2004-06-02
- 학회명
- The 48th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication
- 개최지
- San Diego, USA