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- 제목
- Design of Extreme Proximity Gettering for Advanced Semiconductor Devices Beyond 3X nm Technology - Understanding the dependency of Ta decoration on crystalline nature after device heat-treatment of 3X technology
- 저자
- 박재근
- 발행일
- 2011-10-14
- 학회명
- 2011 SiWEDS Fall Meeting
- 개최지
- Westin Boston Waterfront and the Boston Convention and Exhibition Center