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High transmittance SiC membrane by ECR plasma CVD in combination with Rapid Thermal Annealing
- 제목
- High transmittance SiC membrane by ECR plasma CVD in combination with Rapid Thermal Annealing
- 저자
- 안진호
- 발행일
- 1998-07-01
- 학회명
- International Microprocesses and Nanotechnology Conference