Reduced distribution of threshold voltage shift in double layer NiSi 2 nanocrystals for nano-floating gate memory applications

  • Choi, Sung-Jin
  • Lee, Jun-Hyuk
  • Kim, Dong-Hyoun
  • Oh, Seul-Ki
  • Song, Wangyu
  • ... Lee, Seung-Beck
  • 외 1명
Citations

SCOPUS

0

초록

We report on the fabrication and C-V characteristics of double layer NiSi2 nanocrystals (NCs) with Si3N4 interlayer tunnel barrier for nano-floating gate memory applications. The variation in threshold voltage shift ΔVTH) was measured for samples at different stress voltages. The ΔVTH increased with applied program voltage from 1.0 V at 3 V to 2.3 V at 7 V. Compared with SiO 2, ΔVTH is reduced to 0.2-0.4 V in each program voltages demonstrating possible multi-level-cell (MLC) operation.

키워드

Applied programsC-V characteristicDouble layersMulti-levelNanofloating gate memoryProgram voltageStress voltagesThreshold voltage shiftsTunnel barrierNanocrystalsNanoelectronicsSilicon compoundsThreshold voltage
제목
Reduced distribution of threshold voltage shift in double layer NiSi 2 nanocrystals for nano-floating gate memory applications
저자
Choi, Sung-JinLee, Jun-HyukKim, Dong-HyounOh, Seul-KiSong, WangyuChoi, Seon-JunLee, Seung-Beck
DOI
10.1109/INEC.2010.5424920
발행일
2010-03
유형
Conference Paper
저널명
INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings
페이지
1246 ~ 1247