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Effect of Substrate and Damaged Layter Thickness to Residual Stress and Bow of Free-standing Gallium Nitride Wafers during Wafering Process

  • 박재근
제목
Effect of Substrate and Damaged Layter Thickness to Residual Stress and Bow of Free-standing Gallium Nitride Wafers during Wafering Process
저자
박재근
발행일
2017-10-03
학회명
232nd ECS Meeting
개최지
Gaylord National Resort & Convention Center

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