The Effect of N2O Plasma Treatment on Indium Oxide Thin Film Transistor by low temperature Atomic Layer Deposition

제목
The Effect of N2O Plasma Treatment on Indium Oxide Thin Film Transistor by low temperature Atomic Layer Deposition
저자
박진성
발행일
2016-03-13
학회명
China Semiconductor Technology International Conference
개최지
Shanghai International Convention Center