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The Effect of N2O Plasma Treatment on Indium Oxide Thin Film Transistor by low temperature Atomic Layer Deposition
- 제목
- The Effect of N2O Plasma Treatment on Indium Oxide Thin Film Transistor by low temperature Atomic Layer Deposition
- 저자
- 박진성
- 발행일
- 2016-03-13
- 학회명
- China Semiconductor Technology International Conference
- 개최지
- Shanghai International Convention Center