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Carbon Bond Cleavage of Spin-On-Carbon Film using Ferric Catalyst for Enhancing Chemical-Mechanical-Planarization Polishing Rate

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Carbon Bond Cleavage of Spin-On-Carbon Film using Ferric Catalyst for Enhancing Chemical-Mechanical-Planarization Polishing Rate
저자
박재근
발행일
2023-04-19
학회명
2023 한국물리학회
개최지
대전 컨벤션 센터

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