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Dependence of Decarbonation of Cerium Precursor on Synthesized Ceria Particle and Its Influence of STI CMP Performance
- 제목
- Dependence of Decarbonation of Cerium Precursor on Synthesized Ceria Particle and Its Influence of STI CMP Performance
- 저자
- 백운규
- 발행일
- 2006-05-10
- 학회명
- The 209th Meeting of The Electrochemical Society
- 개최지
- 캐나다 덴버