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Electrical properties of WSi2 nanocrystal memory with Al2O3/HfO2/Al2O3 and SiO2/HfO2/Al2O3 tunnel layer improvement of thermal stability

  • 김은규
제목
Electrical properties of WSi2 nanocrystal memory with Al2O3/HfO2/Al2O3 and SiO2/HfO2/Al2O3 tunnel layer improvement of thermal stability
저자
김은규
발행일
2011-04-15
학회명
2011년 한국물리학회 봄학술논문발표회
개최지
대전컨벤션센터

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