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Quantitative measurement of dust removal efficiency in Tred device for calibration of CDG(Capacitive diaphragm gauge)

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Quantitative measurement of dust removal efficiency in Tred device for calibration of CDG(Capacitive diaphragm gauge)
저자
정규선
발행일
2012-05-22
학회명
20th International Conference on Plasma Surface Interactions in Controlled Fusion Devices
개최지
독일

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