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Fabrication of Al/PZT/RuO2 Micro Cantilever System and Computer Simulation of Resonant Characteristics
- 제목
- Fabrication of Al/PZT/RuO2 Micro Cantilever System and Computer Simulation of Resonant Characteristics
- 저자
- 정용재
- 발행일
- 2001-05-28
- 학회명
- NCF5 & IMA5
- 개최지
- Hanyang University