Fabrication of Al/PZT/RuO2 Micro Cantilever System and Computer Simulation of Resonant Characteristics

제목
Fabrication of Al/PZT/RuO2 Micro Cantilever System and Computer Simulation of Resonant Characteristics
저자
정용재
발행일
2001-05-28
학회명
NCF5 & IMA5
개최지
Hanyang University