ScholarWorks@한양대학교

상세 보기

Fabrication of Sub-30nm Pillar Array by Oxygen Plasma Treatment

제목
Fabrication of Sub-30nm Pillar Array by Oxygen Plasma Treatment
저자
이승백
발행일
2012-02-05
학회명
제 19회 반도체 학술대회
개최지
고려대학교, 서울

ScholarWorks@한양대학교

(04763) 서울특별시 성동구 왕십리로 222 Tel. +82-2-2220-1370 +82-2-2220-1366

COPYRIGHT © 한양대학교 All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.