Non-Thermal Properties in Low Pressure Spraying Plasma

초록

Non-thermal properties of low pressure spraying plasma have been characterized by an optical emission spectroscopy and electric probes installed in a fast scanning probe system. Two-temperature model of electron is introduced to explain the non-isothermal properties of electrons, which is measured by electric probes. Excitation temperatures of atomic and ionic lines are calculated from the measurement of emission intensities of Ar (I) and Ar (II), and they explain local thermodynamic equilibrium (LTE) or the non-local thermodynamic equilibrium (non-LTE) model. In order to deduce more reasonable values (excitation temperatures), multi thermodynamic equilibrium (MTE) model is introduced, which gives different temperatures depending upon the atomic excitation states