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Effects of Abrasive Size and Surfactant Concentration on the Non-Prestonian behavior of Nano-Ceria Slurry for STI CMP

  • 박재근
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Effects of Abrasive Size and Surfactant Concentration on the Non-Prestonian behavior of Nano-Ceria Slurry for STI CMP
저자
박재근
발행일
2003-11-21
학회명
2003 한국재료학회 추계발표대회
개최지
연세대학교

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