Designing Robust Interfaces of HZO Module (>1012 at 85 °c) with High Sensing Margin (>300 mV) for ≤1.1 V 1T-1F with Common Plate Line and 1T-nF FeRAM

  • Jeon, Intak
  • Lim, Hanjin
  • Kim, Seon-yong
  • Kim, Jin-soak
  • Ahn, Sehyoung
  • ... Kwon, Daewoong
  • 외 3명
Citations

SCOPUS

4

초록

Energy-efficient AI will be realized in conjunction with ferroelectric nT-mF in the near future. First, we present a ferroelectric module solution that is equipped with Pr-boosted HZO (2Pr 54 μ C/cm2) and universally improved ILs for FE, MPB and AFE. The films show high write/read endurance cycles (> 1012 at 85 °C). Second, we implement the solution into 1T-1F with a common plate line and 1T-nF FeRAM. We confirm sufficiently high sensing margins (≥300 mV).

키워드

Common plate line1T-1F1T-nFHZO
제목
Designing Robust Interfaces of HZO Module (>1012 at 85 °c) with High Sensing Margin (>300 mV) for ≤1.1 V 1T-1F with Common Plate Line and 1T-nF FeRAM
저자
Jeon, IntakLim, HanjinKim, Seon-yongKim, Jin-soakAhn, SehyoungJung, ChanghwaKwon, DaewoongKwon, HyucknamPark, Sung-Wook
DOI
10.23919/VLSITechnologyandCir65189.2025.11075096
발행일
2025-07
유형
Conference paper
저널명
Digest of Technical Papers - Symposium on VLSI Technology
페이지
1 ~ 3