상세 보기
Electronic Materials Letters
ISSN
P 1738-8090 E 2093-6788
출판사
대한금속·재료학회 The Korean Institute Of Metals And Meterials
국가
SOUTH KOREA
발행 상태
활성
데이터베이스 수록 정보
JCR 2009-2019 (11년)
KCI 2009-2019 (11년)
KCI 등재 2013-2021 (9년)
KCI 등재후보 2008-2013 (6년)
SCIE 2010-2021 (12년)
Scopus 2017-2020 (4년)
SJR 2009-2019 (11년)
전체 32건 중 1번부터 10번까지의 결과를 표시합니다.
2026
Article
Plasma dry desmear of Ajinomoto build-up film for fine micro-via fabrication in advanced semiconductor packaging
- Kim, Gyulee ;
- Kim, Sunbum ;
- Min, Kyoung Yeon ;
- Han, Young Ju ;
- Jeong, Soonoh ;
- ... Choi, Changhwan ;
- 외 1명
- 2026-11
- Materials Science in Semiconductor Processing
- Pergamon Press
Article
Enhanced anisotropy in advanced semiconductor nanofabrication via ultralow electron temperature plasma for cryogenic etching
- Kim, Min-Seok ;
- Ahn, Jong Ha ;
- Kim, Deok Hwan ;
- Ha, Seok Hyeon ;
- Chung, Chin-Wook
- 2026-02
- Materials Science in Semiconductor Processing
- ELSEVIER SCI LTD
Article
Structure-modulated phase stability and defect engineering in ferroelectric HfxZr1-xO2 heterostructures(vol 200 ,109995 , 2025)
- Han, Changhyeon ;
- Kwak, Been ;
- Choi, Joonhyeok ;
- Kwon, Hyucknam ;
- Kwon, Ki-Ryun ;
- ... Kwon, Daewoong ;
- 외 1명
- 2026-01
- Materials Science in Semiconductor Processing
- ELSEVIER SCI LTD
2025
Article
Structure-modulated phase stability and defect engineering in ferroelectric HfxZr1-xO2 heterostructures
- Han, Changhyeon ;
- Kwak, Been ;
- Choi, Joonhyeok ;
- Kwon, Hyucknam ;
- Kwon, Ki-Ryun ;
- ... Kwon, Daewoong ;
- 외 1명
- 2025-12
- Materials Science in Semiconductor Processing
- ELSEVIER SCI LTD
Article
Tunable coercive voltage and polarization of HZO through field-induced phase transitions
- Han, Changhyeon ;
- Kwak, Been ;
- Kwon, Ki-Ryun ;
- Jeong, Soi ;
- Kim, Jeong-Han ;
- ... kwon, Daewoong ;
- 외 1명
- 2025-08
- Materials Science in Semiconductor Processing
- ELSEVIER SCI LTD
Article
High performance of self-powered Ga2O3:Si/p-GaN heterojunction UV photodetectors
- Oanh Vu, Thi Kim ;
- Van, Hai Bui ;
- Tu, Nguyen Xuan ;
- Van Kha, Nguyen ;
- Thu Phuong, Bui Thi ;
- 외 2명
- 2025-07
- Materials Science in Semiconductor Processing
- ELSEVIER SCI LTD
Article
Reduction of trap density in high-k dielectrics through optimized ALD process and high-pressure deuterium annealing
- Hwang, Taewon ;
- Choi, Su-Hwan ;
- Song, Ki-Cheol ;
- Lee, Yeonhee ;
- Kwag, Jae-Hyeok ;
- ... Park, Jin-Seong ;
- 외 2명
- 2025-06
- Materials Science in Semiconductor Processing
- ELSEVIER SCI LTD
Article
Heterogeneous monolithic 3D integration for hybrid vertical CMOS inverter using n-type IGTO TFT on p-type Si FET
- Lee, Chanseul ;
- Kim, Sunbum ;
- Kim, Gyulee ;
- Choi, Changhwan
- 2025-01
- Materials Science in Semiconductor Processing
- ELSEVIER SCI LTD
Article
Enhanced resistance property between ALD-Ru and W by controlling oxygen behavior with post Ru deposition annealing
- Kim, Sung Jun ;
- Kim, Seon Yong ;
- Park, Jun Hyeong ;
- Park, In-Sung ;
- Park, Young Wook ;
- ... Ahn, Jinho
- 2025-01
- Materials Science in Semiconductor Processing
- ELSEVIER SCI LTD
2024
Article
High performance of UV photodetectors by integration of plasmonic Ag nanoparticles on GaN
- Vu, Thi Kim Oanh ;
- Tran, Minh Tien ;
- Xuan Tu, Nguyen ;
- Thi Thanh Bao, Nguyen ;
- Thi Khanh Van, Nguyen ;
- 외 2명
- 2024-10
- Materials Science in Semiconductor Processing
- ELSEVIER SCI LTD
1