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European Journal of Neurology
ISSN
P 1351-5101 E 1468-1331
출판사
Blackwell Publishing Inc. Wiley-Blackwell
국가
USA
발행 상태
활성
데이터베이스 수록 정보
EMBASE 2016-2020 (5년)
JCR 1997-2019 (23년)
MEDLINE 2016-2021 (6년)
SCIE 2010-2021 (12년)
Scopus 2017-2020 (4년)
SJR 1999-2019 (21년)
전체 45건 중 1번부터 10번까지의 결과를 표시합니다.
2026
Article
Noninvasive method for monitoring plasma parameters and dielectric thickness applicable to plasma processing
- Seo, Beom-Jun ;
- Jung, Jiwon ;
- Choi, Jae-Hoon ;
- Ahn, Se-Hun ;
- Kim, Nayeon ;
- ... Chung, Chin-Wook
- 2026-07
- Journal of Vacuum Science and Technology A
- A V S AMER INST PHYSICS
2025
Article
Work function tuning in TiAlN thin films by trace Al doping for CMOS-compatible metal gates
- Jeong, Gyeong Min ;
- Kim, Hae-dam ;
- Park, Jin-Seong
- 2025-12
- Journal of Vacuum Science and Technology A
- A V S AMER INST PHYSICS
2024
Article
Effect of a DC gradient magnetic field on electron density in a weakly magnetized inductively coupled plasma
- He, You ;
- Jiang, Yi-Lang ;
- Lee, Myoung-Jae ;
- Kim, Min-Seok ;
- Seo, Beom-Jun ;
- ... Chung, Chin-Wook ;
- 외 1명
- 2024-12
- Journal of Vacuum Science and Technology A
- A V S AMER INST PHYSICS
Article
Electron temperature and ion density distribution on a vertical section in a weakly magnetized inductively coupled plasma
- He, You ;
- Jiang, Yi-Lang ;
- Lee, Myoung-Jae ;
- Seo, Beom-Jun ;
- Kim, Ju-Ho ;
- ... Chung, Chin-Wook
- 2024-12
- Journal of Vacuum Science and Technology A
- A V S AMER INST PHYSICS
2023
Article
Stabilization of the tetragonal phase in ZrO<sub>2</sub> thin films according to ozone concentration using atomic layer deposition
- Song, Seokhwi ;
- Kim, Eungju ;
- Kim, Kyunghoo ;
- 배장호 ;
- Lee, Jinho ;
- 외 3명
- 2023-12
- Journal of Vacuum Science and Technology A
- A V S AMER INST PHYSICS
Article
Series resonance effects of a variable inductor termination on the nonpowered electrode in capacitively coupled plasmas
- Moon, Ho-Jun ;
- Lee, Jae-Won ;
- Lee, Ho-Won ;
- Lim, Yeong-Min ;
- Jung, Jiwon ;
- ... Chung, Chin-Wook
- 2023-09
- Journal of Vacuum Science and Technology A
- A V S AMER INST PHYSICS
Article
Highly efficient plasma generation in inductively coupled plasmas using a parallel capacitor
- Lim, Yeong-Min ;
- Hong, Young-Hun ;
- 강길호 ;
- Chung, Chin-Wook
- 2023-01
- Journal of Vacuum Science and Technology A
- A V S AMER INST PHYSICS
2022
Article
Harmonic suppression and uniformity improvement of plasma density in capacitively coupled plasma
- Lim, Yeong-Min ;
- Park, So-Yeong ;
- 하우 ;
- Hong, Young-Hun ;
- Chung, Chin Wook
- 2022-12
- Journal of Vacuum Science and Technology A
- A V S AMER INST PHYSICS
Article
Synthesis and characteristics of Sn-doped SiO2via plasma-enhanced atomic layer deposition for self-aligned patterning
- Park, Suhyeon ;
- An, Junyung ;
- Jeon, Hyeongtag
- 2022-12
- Journal of Vacuum Science and Technology A
- A V S AMER INST PHYSICS
Article
Atomic layer deposition of MoNx thin films using a newly synthesized liquid Mo precursor
- Kim, Byunguk ;
- Lee, Sangmin ;
- Kang, Taesung ;
- Kim, Sunghoon ;
- Koo, Sangman ;
- 외 1명
- 2022-12
- Journal of Vacuum Science and Technology A
- A V S AMER INST PHYSICS
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