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IEEE Transactions on Visualization and Computer Graphics
ISSN
P 1077-2626 E 1941-0506
출판사
Institute of Electrical and Electronics Engineers IEEE
국가
USA
발행 상태
활성
데이터베이스 수록 정보
EMBASE 2016-2020 (5년)
JCR 1997-2019 (23년)
MEDLINE 2016-2021 (6년)
SCI 2010-2019 (10년)
SCIE 2010-2021 (12년)
Scopus 2017-2020 (4년)
SJR 1999-2019 (21년)
전체 5건 중 1번부터 5번까지의 결과를 표시합니다.
2018
Article
Effect of a Trap Zone in Reducing Nanoparticle Contamination of Wafers and Photomasks in Parallel Airflowp
- Woo, Sang-Hee ;
- Lee, Jungsuk ;
- Yook, Se-Jin
- 2018-02
- IEEE Transactions on Semiconductor Manufacturing
- IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
2014
Article
Particle Deposition Velocity Onto EUVL Masks in Vertical Airflow
- Kim, Won-Geun ;
- Lee, Handol ;
- Yook, Se-Jin ;
- Lee, Kwan-Soo
- 2014-08
- IEEE Transactions on Semiconductor Manufacturing
- IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Article
Deposition of Charged Particles on a Flat Plate in Parallel Flow in the Presence of an Electric Field
- Lee, Handol ;
- Yook, Se-Jin ;
- Lee, Kwan-Soo
- 2014-05
- IEEE Transactions on Semiconductor Manufacturing
- IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
2011
Article
Detection of Spatial Defect Patterns Generated in Semiconductor Fabrication Processes
- Yuan, Tao ;
- Kuo, Way ;
- Bae, Suk Joo
- 2011-08
- IEEE Transactions on Semiconductor Manufacturing
- IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
2008
Article
Controlled deposition of SiO2 nanoparticles of NIST-traceable particle sizes for mask surface inspection system characterization
- Yook, Se-Jin ;
- Fissan, Heinz ;
- Engelke, Thomas ;
- Asbach, Christof ;
- van der Zwaag, Till ;
- 외 4명
- 2008-05
- IEEE Transactions on Semiconductor Manufacturing
- IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC