Bonding Based Channel Transfer and Low Temperature Process for Monolithic 3D Integration Platform Development

제목
Bonding Based Channel Transfer and Low Temperature Process for Monolithic 3D Integration Platform Development
저자
최창환
발행일
2016-10-13
학회명
IEEE S3S (SOI-3D-Subthreshold Microelectronic Technology Unified) Conference
개최지
Burlingame, USA