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Development of high ion density and uniformity plasma source for large scale descum processing
- 제목
- Development of high ion density and uniformity plasma source for large scale descum processing
- 저자
- 정진욱
- 발행일
- 2022-11-10
- 학회명
- The 20th international Symposium on Microelectronics and Packagin
- 개최지
- 한화리조트(부산)