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Control of axial direction electron temperature distribution by gradient DC magnetic field in Inductively Coupled Plasma
- 제목
- Control of axial direction electron temperature distribution by gradient DC magnetic field in Inductively Coupled Plasma
- 저자
- 정진욱
- 발행일
- 2023-08-22
- 학회명
- 제65회 한국진공학회
- 개최지
- 신화월드(제주)