ScholarWorks@한양대학교

상세 보기

Fabrication of ZnO inorganic thin films by using UV-enhanced Atomic Layer Deposition

제목
Fabrication of ZnO inorganic thin films by using UV-enhanced Atomic Layer Deposition
저자
성명모
발행일
2016-02-19
학회명
제 50회 한국진공학회
개최지
웰리힐리파크

ScholarWorks@한양대학교

(04763) 서울특별시 성동구 왕십리로 222 Tel. +82-2-2220-1370 +82-2-2220-1366

COPYRIGHT © 한양대학교 All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.